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US 2026/0314475 A1Published application
Semiconductor structure
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsXIN ZHI WANG, CHUAN-PING HOU
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Abstract
A semiconductor structure includes a semiconductor substrate, a metal gate structure disposed over the semiconductor substrate, an ILD structure over the semiconductor substrate and surrounding the metal gate structure, and a protecting layer over the ILD structure. A top surface of the protecting layer is aligned with a top surface of the metal gate structure. The protecting layer is separated from the metal gate structure.
Claims20
A semiconductor structure comprising:
- a semiconductor substrate;
- a metal gate structure disposed over the semiconductor substrate;
- an inter-layer dielectric (ILD) structure over the semiconductor substrate and surrounding the metal gate structure;
- and
- a protecting layer over the ILD structure, wherein a top surface of the protecting layer is aligned with a top surface of the metal gate structure, and the protecting layer is separated from the metal gate structure.
2 more elements
A semiconductor structure comprising:
- a semiconductor substrate;
- a metal gate structure disposed over the semiconductor substrate;
- an inter-layer dielectric (ILD) structure over the semiconductor substrate and surrounding the metal gate structure;
- and
- a dope region in the ILD structure and adjacent the metal gate structure.
2 more elements
A semiconductor structure comprising:
- a metal gate structure disposed over a semiconductor substrate;
- a source/drain disposed in the semiconductor substrate;
- an inter-layer dielectric (ILD) structure disposed over the semiconductor substrate and surrounding the metal gate structure;
- an etch stop layer disposed between the ILD structure and the source/drain, and between the ILD structure and the metal gate structure;
- and
- a protecting structure disposed in the ILD structure and separated from the metal gate structure.
3 more elements
Dependencies are inferred from the claim text.