Semiconductor device structure with photodetector
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChen-Hao CHIANG, Li-Weng CHANG, Jiun-Yi WU
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChen-Hao CHIANG, Li-Weng CHANG, Jiun-Yi WU
Estimating the term…
A semiconductor device structure is provided. The semiconductor device structure includes a substrate and a p-type doped structure formed in the substrate. The semiconductor device structure also includes an n-type doped structure formed in the substrate and a photo-sensing epitaxial structure partially or completely surrounded by the substrate. A portion of the photo-sensing epitaxial structure is between the p-type doped structure and the n-type doped structure. The photo-sensing structure extends across a top and a bottom of the n-type doped structure, and the photo-sensing epitaxial structure contains germanium and tin.
A semiconductor device structure, comprising:
A semiconductor device structure, comprising:
A semiconductor device structure, comprising:
Dependencies are inferred from the claim text.