Method of and system for processing threedimensional measurement data from a scanning probe microscopy system, as well as computer program product

A computer-implemented method of processing three-dimensional measurement data from a scanning probe microscopy system for providing three-dimensional topography image data, the scanning probe microscopy system comprising a substrate carrier for supporting a substrate, and a probe including a cantilever and a probe tip for scanning a surface of the substrate for obtaining the three-dimensional measurement data, wherein the method comprises:

• receiving, by a processing device of the computer, the three-dimensional measurement data which has been obtained by the scanning probe microscopy system by said scanning of the surface of the substrate, wherein the three-dimensional measurement data maps a topography of one or more structures comprised by the substrate;
• digitally constructing, by the processing device of the computer, a model image data from building blocks, wherein the building blocks are provided by shapes, wherein each shape is digitally defined by shape contour data, wherein the model image data is constructed by at least one of arranging or sizing of the shape contour data, such as to match the three-dimensional measurement data for mimicking the topography of the one or more structures comprised by the substrate;
• iteratively performing, by the processing device of the computer, a regression operation for fitting the model image data to the three-dimensional measurement data, such as to yield from the fitted model image data a synthetic model image of the three-dimensional topography of the substrate;
• and
• providing, at an output, the synthetic model image as three-dimensional topography image data of the topography of the substrate, for enabling to perform metrology measurements on the topography of the one or more structures.