Microchip gas sensing capacitor
AssigneesSerinus Labs, Inc, The Regents of the University of California
InventorsHossain Fahad, Thach Nguyen, David W. Gardner, Gordon A. Charles, Ali Javey
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AssigneesSerinus Labs, Inc, The Regents of the University of California
InventorsHossain Fahad, Thach Nguyen, David W. Gardner, Gordon A. Charles, Ali Javey
Estimating the term…
A gas sensing microchip device includes a substrate layer and a gas capacitor (GASCAP) having a first electrically conductive plate configured to detect a gas. GASCAP also includes a gas-insensitive, electrically conductive element electrically connected to the first plate and having a first electrical terminal. GASCAP additionally includes a gas-insensitive second electrically conductive plate having a second electrical terminal and a high permittivity dielectric layer arranged between the first and second plates. The high permittivity dielectric layer induces a capacitive charge distribution on the second plate and an electrical bias between the first and second plates in response to the detected gas. The electrical bias generates a transient electrical current flow between the first and second terminals corresponding to the detected gas amount. The device also includes a low permittivity dielectric layer between the substrate layer and the second plate, isolating the GASCAP thermally and electrically from the substrate.
A gas sensing microchip device, comprising:
A gas sensing system, comprising:
Dependencies are inferred from the claim text.