Microsystem Comprising a Flexurally Movable Beam and Multiple Stops
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorThierry VERDOT
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AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorThierry VERDOT
Estimating the term…
Electromechanical microsystem (1), comprising: a beam (10) extending from a base (13) to an end (14), the beam being configured to oscillate about an equilibrium position; at least one strain gauge (11, 12) configured to deform when the angle of rotation of the diaphragm (θ) increases; a first stop extending at a first offset (e1) from the central axis and configured to be in contact with the diaphragm when the end moves away from the central axis beyond a first displacement (y1); a second stop (202) extends at a second offset (e2) from the central axis, the second stop being configured to come into contact with the beam when the end moves away from the central axis according to a second displacement (y2), greater than the first displacement (y1).
A microsystem, comprising:
Dependencies are inferred from the claim text.