Back to results
US 2026/0309423 A1Published application
Heat treatment apparatus
AssigneeTokyo Electron Limited
InventorNaomi ONODERA
Life of this patent
Estimating the term…
Abstract
A heat treatment apparatus includes a cylindrical reaction tube having an opening at a lower end thereof, a lid configured to close the opening, and an annular seal member held by the lid between the cylindrical reaction tube and the lid. The lid includes an annular buffer material fixed to the lid between the cylindrical reaction tube and the lid on a radially outward side of the annular seal member, and the annular buffer material includes a plurality of divided buffer materials which is divided along a circumferential direction.
Claims13
A heat treatment apparatus, comprising:
- a cylindrical reaction tube having an opening at a lower end thereof;
- a lid configured to close the opening;
- and
- an annular seal member held by the lid between the cylindrical reaction tube and the lid,
- wherein the lid includes an annular buffer material fixed to the lid between the cylindrical reaction tube and the lid on a radially outward side of the annular seal member, and
- wherein the annular buffer material includes a plurality of divided buffer materials which is divided along a circumferential direction.
3 more elements
Dependencies are inferred from the claim text.