Monitoring system and monitoring method
AssigneeFuji Corporation
InventorSatoshi IWASHIMA
Life of this patent
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Abstract
A monitoring system for monitoring pressures of multiple vacuum pumps provided in a working device includes: a sensor that detects a pressure of an air flow path communicating with the multiple vacuum pumps; a pressure acquisition section that executes acquisition processing of acquiring a detection value of the sensor as a pressure of an operating vacuum pump in a state in which one of the multiple vacuum pumps is operated and the remaining vacuums pump are stopped, while sequentially switching the vacuum pump to be operated; and a determination section that determines a state of each of the multiple vacuum pumps based on the pressure acquired in the acquisition processing.
Claims7
A monitoring system for monitoring pressures of multiple vacuum pumps provided in a working device, the monitoring system comprising:
- a sensor configured to detect a pressure of an air flow path communicating with the multiple vacuum pumps;
- a pressure acquisition section configured to execute acquisition processing of acquiring a detection value of the sensor as a pressure of an operating vacuum pump in a state in which one of the multiple vacuum pumps is operated and the remaining vacuum pumps are stopped, while sequentially switching the vacuum pump to be operated;
- and
- a determination section configured to determine a state of each of the multiple vacuum pumps based on the pressure acquired in the acquisition processing.
A monitoring system for monitoring a pressure of a vacuum pump provided in a working device, the monitoring system comprising:
- a sensor configured to detect a pressure of an air flow path communicating with the vacuum pump;
- a pressure acquisition section configured to execute, in a state in which the vacuum pump is operated, acquisition processing of acquiring a detection value of the sensor as a pressure of the operating vacuum pump;
- an information acquisition section configured to acquire, as production information, information affected by a pressure change of the vacuum pump in a production work of the working device;
- a storage section configured to store the pressure acquired in the acquisition processing and the production information acquired in the production work before or after execution of the acquisition processing in association with each other;
- and
- a determination section configured to determine a state of the vacuum pump based on the pressure acquired in the acquisition processing and the production information associated with the pressure.
A monitoring method of monitoring pressures of multiple vacuum pumps provided in a working device, the monitoring method comprising:
- (a) a step of executing acquisition processing of acquiring a detection value of a sensor configured to detect a pressure of an air flow path communicating with the multiple vacuum pumps as a pressure of an operating vacuum pump in a state in which one of the multiple vacuum pumps is operated and the remaining vacuum pumps are stopped, while sequentially switching the vacuum pump to be operated;
- and
- (b) a step of determining a state of each of the multiple vacuum pumps based on the pressure acquired in the acquisition processing.
Dependencies are inferred from the claim text.