Diaphragm pump
AssigneeCkd Corporation
InventorsShoji AZUMA, Shigenobu NISHIDA, Honatsu NAKAMURA
Life of this patent
Estimating the term…
Abstract
A diaphragm pump for sucking and discharging a resist liquid supplied to a semiconductor wafer by a predetermined amount is provided with a diaphragm, a body, a detected part, and a detecting part. The diaphragm is formed by forming a film-like resin. The body has a space part in which the diaphragm is disposed so as to be displaceable, and the space part is partitioned into a chemical liquid chamber and a drive chamber. The detected part is held by the body so as to be able to come into contact with a surface positioned on the side of the drive chamber of the diaphragm, and can move following the diaphragm. The detecting part detects the displacement of the diaphragm on the basis of the position of the detected part.
Claims11
A diaphragm pump for sucking and discharging a predetermined amount of a chemical solution at a time, which is to be supplied to a semiconductor wafer, the diaphragm pump comprising:
- a diaphragm made of resin and having a film shape;
- a body including a space part in which the diaphragm is placed to be displaceable, the space part being divided by the diaphragm into a chemical solution chamber in which the chemical solution flows and a drive chamber to which an operating fluid for displacing the diaphragm is supplied;
- a detected part held in the body to contact a surface of the diaphragm, located on a side facing the drive chamber, the detected part being movable to follow the diaphragm;
- and
- a detecting part that detects displacement of the diaphragm based on a position of the detected part, and
- wherein the detected part is movable at a moving distance shorter than a maximum stroke amount of the diaphragm.
(canceled)
A diaphragm pump for sucking and discharging a predetermined amount of a chemical solution at a time, which is to be supplied to a semiconductor wafer the diaphragm pump comprising:
- a diaphragm made of resin and having a film shape;
- a body including a space part in which the diaphragm is placed to be displaceable, the space part being divided by the diaphragm into a chemical solution chamber in which the chemical solution flows and a drive chamber to which an operating fluid for displacing the diaphragm is supplied;
- a detected part held in the body to contact a surface of the diaphragm, located on a side facing the drive chamber the detected part being movable to follow the diaphragm;
- a detecting part that detects displacement of the diaphragm based on a position of the detected part, and
- an urging member that urges the detected part toward the space part,
- wherein the diaphragm has a film thickness of 0.1 mm or more and 0.3 mm or less, and
- wherein the urging member has an urging force of 0.05 N or more and 0.15 N or less.
A diaphragm pump for sucking and discharging a predetermined amount of a chemical solution at a time, which is to be supplied to a semiconductor wafer, the diaphragm pump comprising a diaphragm made of resin and having a film shape;
- a body including a space part in which the diaphragm is placed to be displaceable the space part being divided by the diaphragm into a chemical solution chamber in which the chemical solution flows and a drive chamber to which an operating fluid for displacing the diaphragm is supplied;
- a detected part held in the body to contact a surface of the diaphragm, located on a side facing the drive chamber the detected part being movable to follow the diaphragm;
- and
- a detecting part that detects displacement of the diaphragm based on a position of the detected part,
- wherein when the diaphragm is in an unloaded state where no load is applied to the diaphragm, a part of the diaphragm corresponding to the space part is placed in a deflected state inside the body.
A diaphragm pump for sucking and discharging a predetermined amount of a chemical solution at a time, which is to be supplied to a semiconductor wafer, the diaphragm pump comprising:
- a diaphragm made of resin and having a film shape;
- a body including a space part in which the diaphragm is placed to be displaceable, the space part being divided by the diaphragm into a chemical solution chamber in which the chemical solution flows and a drive chamber to which an operating fluid for displacing the diaphragm is supplied;
- a detected part held in the body to contact a surface of the diaphragm, located on a side facing the drive chamber, the detected part being movable to follow the diaphragm;
- and
- a detecting part that detects displacement of the diaphragm based on a position of the detected part,
- wherein the body includes a retaining hole that has a bottom and opens in an inner wall of the drive chamber,
- the detected part and an urging member that urges the detected part toward the space part are accommodated in the retaining hole, and
- the detecting part is placed outside the retaining hole.
Dependencies are inferred from the claim text.