Modulated reflection bottom cover plate design for cvd non-uniformity improvement

Abstract

A bottom cover plate that enables control of radiative heat transfer associated with a heating element inside a chamber for processing a substrate is provided. The bottom cover plate includes a plate body having a central opening configured to be disposed on a shaft of a pedestal of a substrate processing system. The plate body includes a facing surface configured to face a substrate disposed on a substrate support of the pedestal. The bottom cover plate further includes one or more removable emissivity-modifying modules disposed on the facing surface, wherein the one or more removable emissivity-modifying modules define regions having different emissivity. In some embodiments, the plate body includes a plurality of pinholes configured to receive one or more pins for removably retaining the one or more removable emissivity-modifying modules at selected locations on the facing surface.

Dependencies are inferred from the claim text.