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US 2026/0308764 A1Published application
Tombstone structure systems and methods
AssigneeASM IP Holding B.V.
InventorsBikram Panda, Ankit Kimtee, Dohan Kim, Petri Raisanen, Jereld Lee Winkler
Life of this patent
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Abstract
An outlet passage having a first portion having a first diameter and a second portion having a second diameter, the first diameter being from about one to about 3 times the second diameter, a transition portion disposed between the first portion and the second portion, the transition portion having a chamfer feature that is disposed at an angle between about 20 degrees and about 35 degrees from an outer wall of the second portion.
Claims20
An outlet passage comprising:
- a first portion having a first diameter and a second portion having a second diameter, the first diameter being from about one to about 3 times the second diameter;
- a transition portion disposed between the first portion and the second portion;
- the transition portion having a chamfer feature that is disposed at an angle between about 20 degrees and about 35 degrees from an outer wall of the second portion.
A tombstone block having an internal passageway disposed therein comprising:
- a first portion of the internal passageway;
- a second portion of the internal passageway;
- a transition portion disposed between the first portion and the second portion, the transition portion being in fluid communication with the first portion and the second portion;
- the first portion having a first diameter and the second portion having a second diameter, the first diameter being from about one to about 3 times the second diameter.
1 more element
A method comprising:
- drilling a first portion of an internal passageway in a monolithic tombstone block;
- drilling a transition portion of the internal passageway in the monolithic tombstone block, wherein the drilling is performed at an angle to an axial center of the transition portion so as to form a chamfer feature;
- drilling a second portion of the internal passageway in the monolithic tombstone block, the second portion in fluid communication with the transition portion and the first portion, the first portion having a first diameter and the second portion having a second diameter, the first diameter being from about one to about 3 times the second diameter.
Dependencies are inferred from the claim text.