Glass microstructure, micro-mechanics, and associated use

A microstructure (1) made of glass, comprising:

• a glass substrate (3) that is exposed by laser-induced modification of the glass substrate (3) and subsequent wet-chemical anisotropic etching,
• wherein, for producing the microstructure (1) in a deflection region (12), laser pulses (4) are placed on two mutually opposite tool paths (5a, 5b) which have a respective maximum distance r perpendicular to a contour (6) along a direction of extent (2) of the microstructure (1), said distance corresponds to an etching radius (27) of the wet-chemical etching step, wherein the etching radius (27) lies in a substrate plane (28) of the glass substrate (3) and
• wherein the contour (6) after the wet-chemical exposure has lateral concave indentations (8), which each have a curvature having the etching radius (27) and which are delimited by respective convex ribs (9), and
• wherein the laser pulses (4) are placed such that an extent of a sidewall scalloping of the microstructure (1) is set in a targeted manner in order to improve a homogeneity of mechanical properties of the microstructure (1) or to generate in a targeted manner an inhomogeneity of the mechanical properties of the microstructure (1), and
• the sidewall scalloping is defined as a ratio ty/r, where r=the local etching radius (27) and ty=a respective lateral depth (14) of the respective indentation (8).

A method for producing a micromechanical microstructure made of glass by laser-induced deep etching (LIDE), the method comprising:

• placing laser pulses (4) in a deflection region (12) of the microstructure (1) on two mutually opposite tool paths (5), which have a respective distance r from a contour (6) of the microstructure (1), which distance corresponds to an etching radius (27) of a subsequent wet-chemical etching step,
• wherein the laser pulses (4) are placed on the respective laser line (5) for obtaining at least one of
• a homogeneous distribution of the spatial phase position φ(x)
• or
• a homogeneous extent of a sidewall scalloping along a direction of extent (2) of the microstructure (1), and
• exposing the microstructure by wet-chemical etching.