Bowl assembly and substrate processing apparatus comprising the same

Abstract

A bowl assembly is provided in which fume generation can be reduced. The bowl assembly comprises a first bowl provided to surround a substrate support unit supporting a substrate processed with a processing liquid, a second bowl provided to surround the first bowl, and a third bowl provided to surround the second bowl, wherein each of the first bowl, the second bowl and the third bowl is provided with an upper wall that is provided to be inclined upward in a direction toward the substrate support unit, the upper walls include a first upper wall of the first bowl, a second upper wall of the second bowl, and a third upper wall of the third bowl, and each of the first upper wall, the second upper wall, and the third upper wall has an edge, and any one of the first upper wall, the second upper wall and the third upper wall has a structure that is widened toward its edge from a portion adjacent to its edge.

Dependencies are inferred from the claim text.