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US 2026/0307094 A1Published application
Deposition material collecting spray device, deposition device having the same, and electronic device including display panel manufactured by deposition device
AssigneeSamsung Display Co., Ltd.
InventorsJONGYOON LEE, SEONGWOO JEONG, SOKWON NOH
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Abstract
A spray device includes: a crucible configured to accommodate a deposition material; a device frame on the crucible; a nozzle in the device frame and configured to spray the deposition material toward a substrate; and a recovery unit in the device frame and configured to recover the deposition material spattering in directions other than the direction toward the substrate.
Claims20
A spray device comprising:
- a crucible configured to accommodate a deposition material;
- a device frame on the crucible;
- a nozzle in the device frame and configured to spray the deposition material toward a substrate;
- and
- a recovery unit in the device frame and configured to recover the deposition material spattering in directions other than the direction toward the substrate.
2 more elements
A deposition device comprising:
- a chamber;
- a substrate stage in an interior of the chamber and configured to affix a substrate;
- a mask under the substrate stage and configured to guide a position to which a deposition material is deposited on the substrate;
- a barrier plate under the mask;
- a spray device under the barrier plate and configured to spray the deposition material toward the substrate;
- and
- a movement unit connected to the spray device and configured to move the spray device,
- wherein the spray device is configured to recover the deposition material spattering in directions other than the direction toward the substrate.
5 more elements
An electronic device comprising:
- a processor;
- and
- a display device configured to receive an image signal from the processor and to provide a user with an image corresponding to the image signal,
- wherein the display device comprises:
- a display panel manufactured by a deposition device comprising:
- a chamber;
- a substrate stage in an interior of the chamber and configured to affix a substrate;
- a mask under the substrate stage and configured to guide a position in which a deposition material is deposited on the substrate;
- a barrier plate under the mask;
- a spray device under the barrier plate and configured to spray the deposition material in a direction toward the substrate and to recover the deposition material spattering in directions other than the direction toward the substrate;
- and
- a movement unit connected to the spray device and configured to move the spray device.
9 more elements
Dependencies are inferred from the claim text.