Method for manufacturing semiconductor device, and semiconductor device
AssigneeResonac Corporation
InventorsToshiaki SHIRASAKA, Tomoaki SHIBATA, Tadashi OKUDA, Shizu FUKUZUMI
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AssigneeResonac Corporation
InventorsToshiaki SHIRASAKA, Tomoaki SHIBATA, Tadashi OKUDA, Shizu FUKUZUMI
Estimating the term…
A method for bonding a first semiconductor substrate 100 (semiconductor chip) to a second semiconductor substrate 200 (semiconductor wafer) by hybrid bonding is disclosed. The first semiconductor substrate 100 includes an organic insulating film 102, electrodes 103, and dummy electrodes 104. The second semiconductor substrate 200 includes an organic insulating film 202 and electrodes 203. In this method, after the electrodes 103 and 203 are aligned, the organic insulating films 102 and 202 are bonded to each other, and the electrodes 103 and 203 are bonded to each other. In this hybrid bonding, a dummy electrode 104 protruding more than the terminal electrode 103 is provided on the first semiconductor substrate 100. A tip of the dummy electrode 104 is embedded in the organic insulating film 202 of the second semiconductor substrate 200. This ensures reliable bonding of the semiconductor substrates and improves the manufacturing yield.
A method for manufacturing a semiconductor device, comprising:
A semiconductor device, comprising:
Dependencies are inferred from the claim text.