Bonded body, ceramic circuit substrate, and semiconductor device
AssigneeNiterra Materials Co., Ltd.
InventorsSeiichi SUENAGA, Maki YONETSU, Sachiko FUJISAWA, Yoichiro MORI
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AssigneeNiterra Materials Co., Ltd.
InventorsSeiichi SUENAGA, Maki YONETSU, Sachiko FUJISAWA, Yoichiro MORI
Estimating the term…
According to the embodiment, a bonded body includes a ceramic substrate, a copper plate. A bonding layer is located on at least one surface of the ceramic substrate. The bonding layer bonds the ceramic substrate and the copper plate. The bonding layer includes a Ti reaction layer including titanium nitride or titanium oxide as a major component, and a plurality of first alloys positioned between the Ti reaction layer and the copper plate. Each of the plurality of first alloys includes at least one selected from a Cu—Sn alloy and a Cu—In alloy. The first alloys have mutually-different Sn concentrations or In concentrations. According to the embodiment, a warp amount can be reduced. A heating rate and a cooling rate in the bonding process can be increased. According to the embodiment, a silicon nitride substrate is favorable for the ceramic substrate.
A bonded body, comprising:
Dependencies are inferred from the claim text.