Load port
AssigneeSinfonia Technology Co., Ltd.
InventorsTatsuru Ogawa, Yuki Ishihara, Shinpei Kogiso, Atsushi Suzuki, Yuki Matsumoto, Tatsuya Miura
Life of this patent
Estimating the term…
Abstract
A load port includes: a plate-shaped base member having an opening via which a transfer target object is loaded and unloaded; a door member capable of opening and closing the opening; a link mechanism including a link member having one end rotatably connected to the door member; a guide roller configured to move together with the door member; a guide surface bent to extend from a first direction to a second direction and configured to guide the guide roller; a drive member to which the other end of the link member is rotatably connected; and a driver configured to move the drive member in the second direction.
Claims10
A load port comprising:
- a base member having an opening via which a transfer target object is loaded and unloaded;
- a door member capable of opening and closing the opening;
- a first guide roller installed at one side of the door member and configured to move together with the door member;
- a second guide roller installed at another side of the door member and configured to move together with the door member;
- a first guide member configured to guide the first guide roller so as to guide the door member in a first direction;
- and
- a second guide member provided separately from the first guide member and configured to guide the second guide roller so as to guide the door member in a second direction that is perpendicular to the first direction.
Dependencies are inferred from the claim text.