Wafer boat
AssigneeASM IP Holding B.V.
InventorKianoosh Marandi
Life of this patent
Estimating the term…
Abstract
A wafer boat for carrying a plurality of wafers is disclosed. The wafer boat comprises a bottom member, a top member, and at least three rods, each rod extending between the bottom member and the top member and comprising a plurality of wafer supports. Each rod comprises a stress control cut-out region to limit thermal stresses between the rod and the bottom member.
Claims14
A wafer boat for carrying a plurality of wafers, the wafer boat comprising a bottom member, a top member, and at least three rods, each rod extending between the bottom member and the top member and comprising a plurality of wafer supports, wherein each rod comprises a stress control cut-out region to limit thermal stresses between the rod and the bottom member.
Dependencies are inferred from the claim text.