System and method of offset inspection

Abstract

An air curtain device includes a first chamber, a second chamber, a third chamber, and a diffusion member. The first chamber is in fluid communication with a gas source and receives a gas. The second chamber is in fluid communication with the first chamber, and the third chamber is in fluid communication with the second chamber. The diffusion member is disposed between the second chamber and the third chamber and uniformly supplies the gas from the second chamber to the third chamber. The third chamber includes an internal flow channel having a first end and a second end. The first end is in fluid communication with the second chamber via the diffusion member. The second end is defined by an upright wall and an inclined wall. The air curtain device is configured to provide the gas toward a substrate carrier at an inclined angle through the second end.

Dependencies are inferred from the claim text.