Dual side stealth dicing for forming memory chips
AssigneeMicron Technology, Inc.
InventorsAnkur Harish Shah, Liang Chun FU, Mei Wen Luken, Harjashan Veer Singh, Wen How Sim
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AssigneeMicron Technology, Inc.
InventorsAnkur Harish Shah, Liang Chun FU, Mei Wen Luken, Harjashan Veer Singh, Wen How Sim
Estimating the term…
Methods, systems, and devices associated with use of dual side stealth dicing for forming memory chips are described. A manufacturing process in which stealth dicing operations may be performed multiple times may be adopted. For example, a first stealth dicing operation may be performed on a first semiconductor wafer of a semiconductor wafer stack. A reduction operation may be performed on the first semiconductor wafer to remove a portion of the wafer, the reduced stack may be flipped over and mounted on die-attach film (DAF). A second stealth dicing operation may then be performed on a second semiconductor wafer of the semiconductor wafer stack, such that the semiconductor wafer stack may be fully cut through and singulated.
A method for manufacturing a memory device, comprising:
A memory device, comprising:
A memory device, comprising:
Dependencies are inferred from the claim text.