Semiconductor devices with gate cut structures integrated with fin cut structures
AssigneeIntel Corporation
InventorsSheng-Po Fang, Hwichan Jun, Guillaume Bouche
Life of this patent
Estimating the term…
Loading patent…
AssigneeIntel Corporation
InventorsSheng-Po Fang, Hwichan Jun, Guillaume Bouche
Estimating the term…
Techniques are provided herein to form an integrated circuit having one or more gate cuts that are integrated (e.g., having the same dielectric material) with one or more fin cut structures. According to some such examples, a portion of an integrated circuit may include two transistors with one transistor being an n-channel device with the other being a p-channel device. The transistors may be configured, for instance, as an inverter or other functional circuit. Gate cut structures and fin cut structures are formed around the transistors to isolate the devices from other adjacent devices formed on the die. A same dielectric material may be deposited and polished to complete the formation of both the gate cut structures and the fin cut structures at the same time. The reduction in the number of polishing steps facilitates the formation of smaller gate heights for further cost and area saving.
An integrated circuit comprising:
An electronic device, comprising:
An integrated circuit comprising:
Dependencies are inferred from the claim text.