Conductive film forming apparatus and conductive film forming method
AssigneeShibaura Mechatronics Corporation
InventorsKota ASAOKA, Tatsumi KOBAYASHI, Yasuaki MIYAMOTO, Hitoshi AOYAGI
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Abstract
According to one embodiment of the present disclosure, a conductive film forming apparatus includes: a drum including an inner peripheral surface that forms a hollow structure, and a holding unit that is provided in the inner peripheral surface and holds a substrate; an inkjet head that ejects conductive ink; a rotation mechanism that rotates the drum; and a control unit that controls the inkjet head to eject the conductive ink to a plurality of through micro-holes formed in the substrate, and after ejection of the conductive ink by the inkjet head is completed, controls the rotation mechanism to rotate the drum.
Claims6
A conductive film forming apparatus comprising:
- a drum including an inner peripheral surface that forms a hollow structure, and a holder provided in the inner peripheral surface and configured to hold a substrate;
- an inkjet head configured to eject conductive ink;
- a rotation driver configured to rotate the drum;
- and
- a controller configured to control the inkjet head to eject the conductive ink to a plurality of through micro-holes formed in the substrate, and after ejection of the conductive ink by the inkjet head is completed, to control the rotation driver to rotate the drum.
A conductive film forming method comprising:
- ejecting conductive ink to a plurality of through micro-holes formed in a plate-shaped substrate including a first surface and a second surface opposite to the first surface, from a side of the first surface;
- and
- moving the substrate such that a force is applied to the conductive ink adhering to the substrate in a direction from the first surface toward the second surface.
Dependencies are inferred from the claim text.