Multi-cavity cascaded coupled vertical-cavity surface-emitting laser and manufacture method thereof

Abstract

A multi-cavity cascaded coupled vertical-cavity surface-emitting laser includes, from top to bottom, a top reflector, an oxidation layer, an active region, a predetermined number of assemblies of intermediate reflector and passive cavity, a bottom reflector, and a substrate. A first electrode is arranged on a side of the top reflector away from the oxidation layer, and a second electrode is arranged at two ends of a side of an assembly of intermediate reflector and passive cavity closest to the top reflector. Each assembly includes an intermediate reflector and a passive cavity located on a side of the intermediate reflector away from the active region.

Dependencies are inferred from the claim text.