High voltage divider resistor

A high voltage divider resistor, comprising:

• a substrate having a first surface and a second surface that are opposite to each other;
• a first input inner electrode and a first output inner electrode respectively disposed on two opposite sides of the first surface;
• a plurality of first series inner electrodes arranged on the first surface along a direction from the first input inner electrode toward the first output inner electrode;
• a thick film resistor straddled on the first input inner electrode and an adjacent one of the first series inner electrodes;
• a plurality of first thin film resistors and at least one second thin film resistor sequentially straddled on the first series inner electrodes and separated from each other, wherein a resistance value of each of the at least one second thin film resistor is smaller than a resistance value of each of the first thin film resistors, and a resistance value of the thick film resistor is smaller than 0.5% of a series resistance value of the at least one second thin film resistor and the first thin film resistors;
• a thin film capacitor disposed on the first surface and comprising a first electrode and a second electrode that are spaced apart, wherein the first electrode is connected to the first input inner electrode, and the second electrode is connected to the first output inner electrode;
• a first insulating protection layer covering the first surface and exposing at least one portion of the first input inner electrode, a portion of the first output inner electrode, and a first one and a last one of the first series inner electrodes on which the at least one second thin film resistor is straddled;
• a plurality of second inner electrodes disposed on the first insulating protection layer, and respectively covering the portions of the first input inner electrode and the first output inner electrode, and the first one and the last one of the first series inner electrodes on which the at least one second thin film resistor is straddled;
• a second insulating protection layer covering the first surface and the first insulating protection layer and exposing a connection portion of each of the second inner electrodes;
• a plurality of outer electrodes respectively disposed on the connection portions;
• a diamagnetic isolation layer disposed on the second surface;
• and
• a third insulating protection layer covering the diamagnetic isolation layer.