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US 2026/0299572 A1Published application
Substrate transport system and substrate transport method
AssigneeKawasaki Jukogyo Kabushiki Kaisha
InventorKazuo FUJIMORI
Life of this patent
Estimating the term…
Abstract
A substrate transport system includes a detector to detect at least one of a substrate transported by a substrate transport robot or a substrate mount on which the substrate is placed. The substrate transport system also includes a controller configured or programmed to generate a trained model by machine learning to output transport control information for controlling transport operation of the substrate by the substrate transport robot using a result of detection by the detector as an input.
Claims15
A substrate transport system comprising:
- a substrate transport robot;
- a detector to detect at least one of a substrate transported by the substrate transport robot or a substrate mount on which the substrate is placed;
- and
- a controller configured or programmed to generate a trained model by machine learning to output transport control information for controlling transport operation of the substrate by the substrate transport robot using a result of detection of the at least one of the substrate or the substrate mount by the detector as an input.
1 more element
A substrate transport method comprising:
- detecting at least one of a substrate transported by a substrate transport robot or a substrate mount on which the substrate is placed;
- and
- generating a trained model by machine learning to output transport control information for controlling transport operation of the substrate by the substrate transport robot using a result of detection of the at least one of the substrate or the substrate mount by the detector as an input.
Dependencies are inferred from the claim text.