System and Process for Imprinting
AssigneeMorphotonics Holding B.V.
InventorsRob Antonius Waltherus Neelen, Jan Matthijs Ter Meulen
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Abstract
The invention relates to a system for imprinting, in particular nanoimprinting, including at least one substantially flexible stamp configured for imprinting, in particular nanoimprinting, at least one roller configured for exerting pressure onto at least one substantially flexible stamp and/or at least one substrate which is to be imprinted and at least one stage configured for providing support to at least one substrate during imprinting. At least one roller and at least one stage are mutually displaceable in at least an imprint direction in particular such that imprinting is facilitated and wherein the system includes at least one connector which is configured to improve the alignment before and during imprinting.
Claims21
A system for imprinting or nanoimprinting, comprising:
- at least one substantially flexible stamp configured for imprinting, in particular or nanoimprinting;
- at least one roller configured for exerting pressure onto the at least one substantially flexible stamp and/or at least one substrate which is to be imprinted;
- at least one carrier configured for carrying the at least one substrate which is to be imprinted
- at least one stage configured for providing support to the at least one carrier and/or the at least one substrate during imprinting;
- wherein the at least one roller and the at least one stage are mutually displaceable in at least an imprint direction such that imprinting is facilitated;
- and wherein the system comprises:
- at least one connector which is attached or attachable to at least part of the substantially flexible stamp and to at least part of the stage;
- and
- wherein at least part of the at least one carrier is situated between the at least one roller and the at least one stage, and wherein the at least one carrier and the at least one stage are mutually displaceable between at least:
- an adjusting position, wherein said carrier and said stage are mutually displaceable in at least one direction which differs from the imprint direction such that the at least one substrate provided upon said carrier can be aligned with respect to said stage;
- and
- an imprinting position, wherein the at least one carrier is positioned such that the at least one substrate provided upon said carrier can be imprinted.
(canceled)
Dependencies are inferred from the claim text.