Graphic data generation method, graphic data generation device, quantum beam writing method, quantum beam writing device, and computer-readable recording medium
AssigneeNuFlare Technology, Inc.
InventorsKenichi YASUI, Daisuke HARA
Life of this patent
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Abstract
In one embodiment, a graphic data generation method includes receiving first graphic data in which a plurality of graphics are defined, and adding, in accordance with presence/absence of an adjacent graphic, adjacency information including the presence/absence of the adjacent graphic to each of the plurality of graphics to generate second graphic data to be used in a quantum beam writing device.
Claims10
A graphic data generation method comprising:
- receiving first graphic data in which a plurality of graphics are defined;
- and
- adding, in accordance with presence/absence of an adjacent graphic, adjacency information including the presence/absence of the adjacent graphic to each of the plurality of graphics to generate second graphic data to be used in a quantum beam writing device.
A graphic data generation device configured to:
- receive first graphic data in which a plurality of graphics are defined;
- and
- add, in accordance with presence/absence of an adjacent graphic, adjacency information including the presence/absence of the adjacent graphic to each of the plurality of graphics to generate second graphic data to be used in a quantum beam writing device.
A non-transitory computer-readable recording medium storing a program for causing a computer to execute the steps of:
- receiving first graphic data in which a plurality of graphics are defined;
- and
- adding, in accordance with presence/absence of an adjacent graphic, adjacency information including the presence/absence of the adjacent graphic to each of the plurality of graphics to generate second graphic data to be used in a quantum beam writing device.
A quantum beam writing method comprising:
- reading, from a storage device, graphic data obtained by adding adjacency information including presence/absence of an adjacent graphic to a graphic to be written;
- identifying the adjacent graphic based on the adjacency information;
- performing edge processing of each graphic in consideration of the adjacent graphic;
- virtually dividing a writing region of a writing target substrate into a plurality of pixels with a predetermined size, and calculating an area density of a graphic arranged in each pixel after the edge processing;
- calculating a radiation dose of a quantum beam using the area density;
- and
- irradiating the writing target substrate with the quantum beam at the radiation dose to write a graphic pattern.
A quantum beam writing device comprising:
- an edge determination unit that reads, from a storage device, graphic data obtained by adding adjacency information including presence/absence of an adjacent graphic to a graphic to be written, and identifies the adjacent graphic based on the adjacency information;
- an edge processing unit that performs edge processing of each graphic in consideration of the adjacent graphic, virtually divides a writing region of a writing target substrate into a plurality of pixels with a predetermined size, and calculates an area density of a graphic arranged in each pixel after the edge processing;
- and
- a writing unit that irradiates the writing target substrate with a quantum beam at a quantum beam radiation dose calculated using the area density to write a graphic pattern.
Dependencies are inferred from the claim text.