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US 2026/0299430 A1Published application
Optical system including optical filter and corresponding method
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHao-Ming CHANG, Chun-Lang CHEN
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Abstract
An optical filter assembly for an optical system includes a filter body. The filter body includes a mesh defining a plurality of cells. The filter body includes a filter material positioned in the cells and configured to pass light from a light source to a target. The optical filter assembly includes a frame configured to hold the filter body.
Claims20
A system, comprising:
- a light source configured to generate light;
- a target configured to receive the light;
- and
- a first filter assembly positioned to filter the light upstream from the target and including:
- a filter body including a mesh defining a plurality of cells;
- a filter material positioned in the cells and configured to pass the light from the light source to the target;
- and
- a filter frame configured to hold the filter body.
5 more elements
A device, comprising:
- an optical filter body including:
- a filter material configured to receive light and to pass filtered light;
- a plurality of trenches in the filter material;
- a mesh including a mesh material in the trenches defining a plurality of cells of the filter material;
- and
- a filter frame configured to hold the filter body.
3 more elements
A method, comprising:
- holding, with a filter frame in an optical system, a filter body including a mesh defining a plurality of cells and a filter material positioned in the cells;
- receiving light at the filter body;
- filtering the light with the filter material in the cells;
- and
- receiving the light at a target downstream from the filter body.
2 more elements
Dependencies are inferred from the claim text.