Current monitor combining a shunt resistor with a rogowski coil

Abstract

A current measurement device has a rigid substrate, vias filled with a conductive material through the rigid substrate, conductive layers on the top surface and the bottom surface connecting to the vias to form a Rogowski coil structure, one or more insulative layers directly on the coil structure, a shunt resistor directly on the one or more insulative layers, and measurement contacts on the bottom surface. A method of manufacturing a current measurement device includes masking a rigid substrate, removing portions of the substrate to form holes, depositing conductive material in the holes to form conductive vias, depositing a second layer of conductive material to form a coil pattern, masking and patterning the second layer to form a Rogowski coil, and connecting a shunt resistor to the Rogowski coil structure.

Dependencies are inferred from the claim text.