Physical quantity detection element, physical quantity detection device, and method of manufacturing physical quantity detection element

Abstract

A physical quantity detection element includes a vibrating substrate including a base portion, a plurality of vibrating arms coupled to the base portion, and a protrusion portion protruding from a side surface of the base portion, and a first detection electrode, a second detection electrode, a third detection electrode, a fourth detection electrode, a drive electrode, and a drive constant potential electrode disposed on any one of the plurality of vibrating arms, in which a wiring separation portion configured to separate any one of the first detection electrode, the second detection electrode, the third detection electrode, and the fourth detection electrode from the drive constant potential electrode is disposed on a side surface of the protrusion portion, and the drive electrode is disposed, in a plan view of the base portion, on a side opposite to the wiring separation portion side of the protrusion portion.

Dependencies are inferred from the claim text.