Electromagnetic wave detection element and electromagnetic wave sensor provided with same
AssigneeTDK Corporation
InventorsSusumu AOKI, Eiji KOMURA, Shinji HARA, Naoki OHTA, Takahiro NAKAGAWA
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AssigneeTDK Corporation
InventorsSusumu AOKI, Eiji KOMURA, Shinji HARA, Naoki OHTA, Takahiro NAKAGAWA
Estimating the term…
An electromagnetic wave detection element comprises a bolometer that includes an electromagnetic wave absorber, and an arm part that includes a wiring layer that is electrically connected to the bolometer. A part of the arm part is arranged with a first gap between the arm part and the bolometer, and the electromagnetic wave absorber includes a first protruding part and a second protruding part adjacent to each other in a first direction and separated by a second gap.
An electromagnetic wave detection element, comprising:
An electromagnetic wave detection element, comprising:
Dependencies are inferred from the claim text.