Pumping Device, Pumping Method, and Radiation Generator Thereof

A pumping method for a pumping device, wherein the pumping device comprises a first chamber, a second chamber, and a third chamber, the second chamber is connected between the first chamber and the third chamber, and the pumping method comprising:

• maintaining pressure within the second chamber lower than pressure within the first chamber, pressure within a first compartment of the third chamber, and pressure within a second compartment of the third chamber;
• and
• maintaining a connection between the first compartment and the second chamber through an open end and at least one hole of the first compartment;
• wherein a channel structure divides the third chamber into the first compartment and the second compartment;
• wherein the first compartment is enclosed between the second chamber and the second compartment;
• wherein the open end and the at least one hole are oriented at different angles.

A radiation generator, comprising:

• a first chamber;
• a second chamber, connected to the first chamber via a first open end;
• and
• a third chamber, connected to the second chamber via a second open end;
• wherein input radiation is converted at least into extreme ultraviolet (XUV) radiation via at least one nonlinear process in the first chamber or between the first open end and the second open end;
• wherein a channel structure divides the third chamber into a first compartment and a second compartment;
• wherein the first compartment and the second chamber are connected through an open end and at least one hole of the first compartment;
• wherein the open end and the at least one hole are oriented at different angles.