Gallium nitride crystal, gallium nitride substrate, and method for producing gallium nitride crystal
AssigneesMitsubishi Chemical Corporation, The Japan Steel Works, Ltd.
InventorsYutaka MIKAWA, Kouhei KURIMOTO, Quanxi BAO
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Abstract
A method for producing a gallium nitride crystal of high quality includes a seed preparation step and a crystal growth step. In the seed preparation step, a GaN seed having a nitrogen polar growth surface with a dislocation density of 1×106 cm−2 or less, is obtained by a liquid phase growth method. In the crystal growth step, a gallium nitride crystal grows on the nitrogen polar surface of the GaN seed by an ammonothermal method at a pressure of 200 MPa or less and a temperature of a crystal growth region of 600° C. or higher, in the presence of a mineralizer containing fluorine.
Claims6
A method for producing a gallium nitride crystal, the method comprising:
- a seed preparation step of preparing a GaN seed, which is obtained by a liquid phase growth method and has a nitrogen polar surface;
- and a crystal growth step of growing a GaN crystal on the nitrogen polar surface of the GaN seed by an ammonothermal method by setting a pressure in a reaction vessel containing one or more mineralizers containing fluorine to 200 MPa or less and a temperature of a crystal growth region to 600° C. or higher, wherein
- the GaN seed has a growth surface with a dislocation density of 1×106 cm−2 or less,
- the reaction vessel optionally further contains one or more mineralizers not containing fluorine, which forms a mineralizer mixture including the one or more mineralizers not containing fluorine and the one or more mineralizers containing fluorine, and
- with the proviso that the mineralizer mixture including the one or more mineralizers not containing fluorine and the one or more mineralizers containing fluorine is used, a proportion of the one or more mineralizers containing fluorine, relative to a total content of the mineralizer mixture, is 60 mol % or more.
Dependencies are inferred from the claim text.