Methods for preparing an ingot in an ingot puller apparatus having a heat shield disposed below a side heater
AssigneeGlobalWafers Co., Ltd.
InventorsSumeet S. Bhagavat, Parthiv Daggolu, Benjamin Michael Meyer, JaeWoo Ryu
Life of this patent
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Abstract
Ingot puller apparatus having a heat shield disposed below a side heater and methods for preparing an ingot in such ingot puller apparatus are disclosed. In some embodiments, the side heater is relatively short. The side heater may be fully above a floor of the crucible when the crucible is in its lowest position in the ingot puller.
Claims8
A method for preparing an ingot in an ingot puller apparatus comprising a crucible having a floor and sidewall extending from the floor, a side heater disposed radially outward to the crucible sidewall, and a heat shield disposed directly below the side heater, the method comprising:
- forming a melt of silicon in the crucible when the crucible is in a lowest position, the side heater being fully above the floor of the crucible when the crucible is in the lowest position;
- contacting the melt with a seed crystal;
- withdrawing an ingot from the silicon melt;
- and
- raising the crucible as the ingot is withdrawn from the silicon melt, the crucible being in a terminal position when the ingot is separated from the melt.
Dependencies are inferred from the claim text.