Molybdenum target and method for producing the same

Abstract

A molybdenum target is provided in which pore generation, a cause of particle formation, is suppressed, and pore size and distribution are precisely controlled. The target is formed from a sintered body of molybdenum powder and has a relative density of 99% or higher, an oxygen content of 25 ppm or less, a carbon content of 30 ppm or less, a tungsten content of 10-100 ppm, and a molybdenum content (excluding oxygen, carbon, and tungsten) of 99.999 mass % or more. Within an observation field of 0.15 mm2, the target contains 20 or fewer pores of 0.01 μm2 to <0.2 μm2, 5 or fewer pores of 0.2 μm2 to <1.8 μm2, and at most 1 pore of ≥1.8 μm2. A production method for achieving these characteristics is also provided.

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