Adjustable millimeter wave rf mems switch

An adjustable millimeter wave radio frequency (RF) micro-electro-mechanical system (MEMS) switch, comprising:

• a substrate comprising at least one signal line;
• a metal beam disposed across the signal line and comprising a first fixed end and a second fixed end respectively located on two sides of the signal line, a first bending portion and a second bending portion respectively connected to the first fixed end and the second fixed end, and an adsorption portion disposed between the first bending portion and the second bending portion;
• a first drive electrode and a second drive electrode respectively located on the two sides of the signal line, wherein the first fixed end and the second fixed end are separately connected to the substrate, projection areas of the first bending portion and the second bending portion respectively at least partially overlap the first drive electrode and the second drive electrode, and a projection area of the adsorption portion at least partially overlaps the signal line;
• two capacitive coupling structures respectively located between the first bending portion of the metal beam and the first drive electrode and between the second bending portion of the metal beam and the second drive electrode to implement capacitive coupling driving;
• and
• a short-circuited stub disposed on the substrate on a side of the second fixed end and connected to the second fixed end.