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US 2026/0295725 A1Published application
Method and apparatus for alignment of workpiece
AssigneeORC Manufacturing Co., Ltd.
InventorsJin SATO, Akira NAKAZAWA
Life of this patent
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Abstract
A method for alignment of a workpiece includes: a) arranging a plurality of alignment cameras for a processing unit used in processing a workpiece; b) setting a plurality of subdivision areas in the workpiece based on an array of alignment marks formed on the workpiece; and c) capturing alignment marks included in a subdivision area by a common alignment camera used for respective subdivision areas.
Claims12
A method for alignment of a workpiece, comprising:
- arranging a plurality of alignment cameras for a processing-unit for processing a workpiece;
- setting a plurality of subdivision areas in the workpiece based on array of alignment marks formed on the workpiece;
- and
- capturing alignment marks included in a subdivision area by a common alignment camera used for respective subdivision areas.
1 more element
An apparatus for alignment of a workpiece, comprising:
- a plurality of alignment cameras configured to be arranged spaced apart from one another at a predetermined interval corresponding to a center interval between neighboring subdivision areas that are defined on the workpiece;
- a processing stage, the workpiece being mounted on said processing stage;
- and
- a controller configured to control an alignment process, said controller controlling said processing stage or said plurality of alignment cameras to capture alignment marks included in a subdivision area by a common alignment camera used for respective subdivision areas.
1 more element
Dependencies are inferred from the claim text.