Two-dimensional monitoring system and method for laser processing process based on trajectory compensation mechanism

Abstract

A two-dimensional monitoring system and method for a laser processing process based on a trajectory compensation mechanism are provided, including a laser light source, a probing module, a galvanometer scanner, a processing assembly, and a control module. The probing light beam from the probing module passes through the galvanometer scanner and is incident on the processing assembly, and the probing module collects returned light signals along the probing light scanning path; the processing light beam from the laser light source is incident on the processing module; the processing assembly processes the workpiece to be processed after coaxially coupling two beams of light; and the control module generates two-dimensional cross-sectional images based on light signals collected by the probing module. The present disclosure improves the controllability and stability of the processing process, and provides an intuitive and efficient online feedback means for laser processing quality control.

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