Method and system for catalyzed gas-phase deposition of polymeric material
AssigneeASM IP Holding B.V.
InventorsYen-Ting Lin, Kristina Paula Martinez, Krzysztof Kamil Kachel, Adam Vianna, Eric Walter Eckert Vadelius
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Abstract
Gas-phase methods of and reactor systems for depositing a layer of polymeric material on a surface of a substrate are disclosed. Exemplary methods include providing a reactant to a reaction chamber, providing a precursor to the reaction chamber, and providing a catalyst to the reaction chamber, wherein the catalyst catalyzes a polymerization reaction involving the precursor and the reactant to form the layer of polymeric material.
Claims20
A method of forming a structure comprising a layer of polymeric material, the method comprising:
- providing a substrate in a reaction chamber of a reactor of a reactor system;
- providing a reactant, comprising an amine compound comprising at least two amine groups, to the reaction chamber;
- providing a precursor, comprising at least one anhydride compound, to the reaction chamber;
- and
- providing a catalyst to the reaction chamber,
- wherein the catalyst catalyzes a polymerization reaction involving the precursor and the reactant to form the layer of polymeric material.
A reactor system comprising:
- a reaction chamber;
- a precursor source comprising a vessel and at least one anhydride compound therein;
- a reactant source comprising a vessel and at least one amine compound comprising at least two amine groups therein;
- a catalyst source comprising a vessel and at least one catalyst therein;
- and
- a controller configured to:
- provide a precursor to the reaction chamber;
- provide a reactant to the reaction chamber;
- and
- provide a catalyst to the reaction chamber, to form a layer of polymeric material.
Dependencies are inferred from the claim text.