Semiconductor device substrate and method for producing semiconductor device substrate
AssigneeNGK Insulators, Ltd.
InventorsTakeshi KAKU, Izumi MASUDA, Takashi EBIGASE
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AssigneeNGK Insulators, Ltd.
InventorsTakeshi KAKU, Izumi MASUDA, Takashi EBIGASE
Estimating the term…
A semiconductor device substrate according to the present invention includes a silicon nitride ceramic substrate including a first surface and a second surface, a bonding layer disposed on the first surface and the second surface, and a copper plate disposed on the bonding layer, wherein the copper plate has a region in which an average crystal grain size of copper increases as a distance from an interface between the bonding layer and the copper plate increases, in which the average crystal grain size of copper at a first position separated from the interface by 20 μm is 25 μm or more and less than 100 μm, and the average crystal grain size of copper at a second position separated from the interface by 250 μm is 100 μm or more.
A semiconductor device substrate comprising:
A method for producing a semiconductor device substrate, the method comprising:
Dependencies are inferred from the claim text.