Systems and methods for fabricating superconducting integrated circuits

A superconducting integrated circuit comprising:

• a microwave sensitive component having a footprint and formed in multiple interconnected layers of the superconducting integrated circuit;
• a microwave shield, the microwave shield comprising a microwave shielding base layer and one or more sides that extend from the microwave shielding base layer including at least one shielding layer that extends through multiple layers of the superconducting integrated circuit to at least partially enclose the microwave sensitive component, the microwave shielding base layer having a footprint;
• and
• a dielectric material surrounding the microwave sensitive component, the dielectric material disposed between the microwave shielding base layer and the microwave sensitive component and between the one or more sides and the microwave sensitive component, the dielectric material being a silicon compound;
• wherein the microwave shield is sized and positioned such that a footprint of the microwave sensitive component is contained within the footprint of the microwave shielding base layer and the one or more sides extend around at least a portion of the microwave sensitive component.