Transistor device with multi-layer channel structure
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYa-Yun Cheng, Wen-Ling Lu, Yu-Chien Chiu, Chung-Wei Wu, Zhiqiang Wu
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYa-Yun Cheng, Wen-Ling Lu, Yu-Chien Chiu, Chung-Wei Wu, Zhiqiang Wu
Estimating the term…
An integrated chip including a gate layer. An insulator layer is over the gate layer. A channel structure is over the insulator layer. A pair of source/drains are over the channel structure and laterally spaced apart by a dielectric layer. The channel structure includes a first channel layer between the insulator layer and the pair of source/drains, a second channel layer between the insulator layer and the dielectric layer, and a third channel layer between the second channel layer and the dielectric layer. The first channel layer, the second channel layer, and the third channel layer include different semiconductors.
An integrated chip comprising:
An integrated chip comprising:
An integrated chip comprising:
Dependencies are inferred from the claim text.