US 2026/0291183 A1 · SEMICONDUCTOR OPTICAL DEVICE

Abstract

A semiconductor optical device includes: a mesa-stripe structure extending in a first direction; a pair of buried layers, each buried layer including a first slope surface adjacent to a top surface of the mesa-stripe structure, each buried layer including a first upright surface that stands straight from an upper end of the first slope surface, each buried layer including an upper surface higher than the top surface; an insulating film on the upper surface; and an electrode film over the top surface, the first slope surface, and the insulating film. The first upright surface has an upper end. The upper surface of at least one of the pair of buried layers has recesses. Each recess has a second slope surface that slopes downward from the upper surface. The second slope surface has an upper end that extends along a second direction perpendicular to the first direction.

Claims20

Dependent claims

A semiconductor optical device comprising:

a mesa-stripe structure extending in a first direction;
a buried layer configured to bury both sides of the mesa-stripe structure;
an insulating film on an upper surface of the buried layer and not on a top surface of the mesa-stripe structure;
and
an electrode continuously disposed on the top surface of the mesa-stripe structure and on the upper surface of the buried layer,
wherein the insulating film includes a cut-out section, in a plan view, depressed in a second direction that is perpendicular to the first direction, and
wherein the electrode is disposed inside and outside the cut-out section.

4 more elements

Dependencies are inferred from the claim text.

Semiconductor optical device

Life of this patent

Semiconductor optical device

Life of this patent

Abstract

Claims20