Control parameter adjustment apparatus, control parameter adjustment method, and storage medium

A control parameter adjustment apparatus that adjusts a set value of a control parameter of a substrate processing apparatus operating based on the control parameter to process a substrate comprising:

• an arithmetic processing unit that calculates a recommended value of the control parameter,
• wherein the arithmetic processing unit executes:
• connection relationship setting processing of setting a connection relationship between nodes by using the control parameter as an explanatory variable, using measurement data related to a physical quantity measured by the substrate processing apparatus as an intermediate variable, using quality data related to a quality of substrate processing by the substrate processing apparatus as an objective variable, and using the explanatory variable, the intermediate variable, and the objective variable as nodes;
• first learning processing of learning an input/output relationship of the intermediate variable in a network based on the connection relationship set by the connection relationship setting processing using a data set of the explanatory variable and the intermediate variable;
• second learning processing of learning an input/output relationship of the objective variable in the network using a data set of the explanatory variable, the intermediate variable, and the objective variable;
• and
• search processing of executing Bayesian optimization using a prediction model obtained by the first learning processing and the second learning processing, a search range, and an acquisition function, and searching for a recommended value of the control parameter that brings the quality close to a target quality, and
• the arithmetic processing unit uses a prior distribution that induces sparsity as a prior distribution of weight parameters in the second learning processing.