Sulfonate, oxime sulfonate, imide sulfonate, amide sulfonate, acid generator containing said compound, and photoresist containing said acid generator
AssigneeSan-Apro Ltd.
InventorAtsushi Shiraishi
Life of this patent
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AssigneeSan-Apro Ltd.
InventorAtsushi Shiraishi
Estimating the term…
Provided are a novel compound that does not have a perfluoromethyl group or a perfluoromethylene group but easily decomposes under light irradiation to generate a sulfonic acid with high acid strength, an acid generator containing the compound, and a photoresist containing the acid generator. The compound of the present invention is a salt of an anion represented by formula (a-1) or (a-2) and a cation. In each formula, R1 represents an optionally substituted hydrocarbon group or heterocyclic group. L represents a single bond or a linking group. R10 represents a fluorine atom, an aromatic hydrocarbon group, or an aromatic heterocyclic group, and n represents 0 or 1.
A compound which is a salt of an anion represented by formula (a-1) or (a-2):
A compound represented by formula (b-1) or (b-2):
A compound represented by formula (c-1) or (c-2):
A compound represented by formula (d-1) or (d-2):
Dependencies are inferred from the claim text.