Optical device, integrated optical device, and method of manufacturing optical device

Abstract

An optical device includes: a substrate; a waveguide layer that is provided on the substrate, and that includes an optical waveguide including an incident port on which light from outside becomes incident and an exit port from which the light emerges outside, the optical waveguide propagating the light from the incident port to the exit port; and a protection layer that is provided on the waveguide layer, in which, among peripheral surfaces of a stack of the substrate, the waveguide layer, and the protection layer, a first side surface having neither the incident port nor the exit port has a surface roughness greater than a second side surface having the incident port or the exit port.

Dependencies are inferred from the claim text.