Transparent optical structure and manufacturing method thereof
AssigneeSTMicroelectronics International N.V.
InventorsMaxime ARGOUD, Francois GUYADER, Pierre TISSIER
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Abstract
The present description concerns a method for manufacturing a transparent optical structure 10, including a step of making a protective layer covering a conductive layer 21, by CVD deposition under vacuum, with thermally exposing to a first temperature T1 greater than, or equal to within 10%, to a second temperature T2 at least equal to 300°C for a first duration Δt1 greater than, or equal to within 10%, a second duration Δt2 at least equal to 60min; and then a subsequent step of thermally exposing to the temperature T2 for the duration Δt2.
Claims20
A method for manufacturing a transparent optical structure, the method comprising:
- forming a transparent layer;
- forming a conductive layer, which is made of a transparent and electrically conductive material, on a face of the transparent layer;
- forming a protective layer, which is made of a transparent and electrically insulating material, on the conductive layer by chemical vapor deposition;
- forming a conductive track, covered with a protective track, by lithography and etching the protective layer and the conductive layer;
- forming an encapsulation layer, which is made of a transparent and electrically insulating material, on the transparent layer, the protective track, and the conductive track.
A transparent optical structure, comprising:
- a transparent layer;
- a conductive track, extending on a face of the transparent layer, made of a transparent and electrically conductive material;
- a protective track, covering a face of the conductive track opposite to the transparent layer, made of a transparent and electrically insulating material;
- and
- an encapsulation layer, made of a transparent and electrically insulating material, covering the transparent layer, the protective track, and the conductive track.
An optical diffuser, comprising:
- a transparent layer;
- a conductive track, extending on a face of the transparent layer, made of a transparent and electrically conductive material;
- a protective track, covering a face of the conductive track opposite to the transparent layer, made of a transparent and electrically insulating material;
- and
- an encapsulation layer, made of a transparent and electrically insulating material, covering the transparent layer, the protective track, and the conductive track,
- wherein the transparent layer is a diffusing layer including diffusing structures arranged in a main plane of the transparent layer and located in an encapsulating material having a refractive index different from that of the diffusing structures.
Dependencies are inferred from the claim text.