Pressure sensor
AssigneeMurata Manufacturing Co., Ltd.
InventorHisashi DEGUCHI
Life of this patent
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AssigneeMurata Manufacturing Co., Ltd.
InventorHisashi DEGUCHI
Estimating the term…
A pressure sensor is provided for reducing adhesion of liquid to a detection portion. The pressure sensor includes a base member; a detection element on the base member and that has a detection portion; a covering member on the base member to cover at least a portion of the detection element other than the detection portion and that has a hole portion opened in an upper surface opposite to the base member to expose the detection portion; a soft member supported by an upper surface of the covering member and that is softer than the covering member; and a cover member supported by the soft member and that closes an opening of the hole portion. A gap space is present between the cover member and the soft member and is in communication with both the hole portion and a through hole in the cover member.
A pressure sensor comprising:
Dependencies are inferred from the claim text.