Three-phase capacitive position sensor

A position sensor, comprising:

• a stationary electrode plate comprising:
• a first phase electrode;
• a second phase electrode;
• and
• a third phase electrode;
• a movable electrode plate proximate the stationary electrode plate, comprising:
• a first movable electrode;
• a second movable electrode;
• and
• a third movable electrode;
• and
• a control unit configured to:
• apply a first excitation signal on the first phase electrode;
• apply a second excitation signal on the second phase electrode;
• apply a third excitation signal on the third phase electrode;
• measure a first response on the first phase electrode;
• measure a second response on the second phase electrode;
• measure a third response on the third phase electrode, wherein movement of at least one of the first movable electrode, the second movable electrode, or the third movable electrode is a function of at least one of the first excitation signal applied to the first phase electrode, the second excitation signal applied to the second phase electrode, or the third excitation signal applied to the third phase electrode;
• perform a Clarke transform using the first response, the second response, and the third response to generate an in-phase component and a quadrature component;
• and
• generate a position measurement based on the in-phase component and the quadrature component.