Substrate Support and Substrate Processing Apparatus

Abstract

Provided is a substrate support comprising: a substrate mounting part having a mounting surface for mounting a substrate, a back surface provided on the opposite side of the mounting surface, and a recess formed in the back surface; a rod-shaped temperature measuring part configured to detect a temperature at a tip end thereof, the tip end being inserted into and brought into contact with the recess to detect a temperature; and a heat transfer part including a plate-shaped flange portion having a through-hole through which the temperature measuring part penetrates and in thermal contact with the back surface, and a cylindrical portion protruding from the flange portion and whose inner surface is brought into contact with the temperature measuring part.

Dependencies are inferred from the claim text.