Polishing composition, method for producing substrate, and polishing system
AssigneeFujimi Incorporated
InventorTakahito Nagano
Life of this patent
Estimating the term…
Abstract
The present disclosure provides a polishing composition excellent in the balance among an excellent unevenness elimination ability on an object to be polished, an enhancement in polishing removal rate of an object to be polished, and a defect reduction on a surface of a polished object. The present disclosure relates to a polishing composition containing (A) an amine compound having a heterocyclic structure containing two or more nitrogen atoms, and (B) a water-soluble polymer, in which the content mass ratio of the component (A) to the component (B) (component (A)/component (B)) is 1 or more, the polishing composition has a pH of 8 or more, and the polishing composition is substantially free of an abrasive grain.
Claims12
A polishing composition comprising
- (A) an amine compound having a heterocyclic structure containing two or more nitrogen atoms, and
- (B) a water-soluble polymer,
- wherein a content mass ratio of the component (A) to the component (B) (component (A)/component (B)) is 1 or more,
- the polishing composition has a pH of 8 or more, and
- the polishing composition is substantially free of an abrasive grain.
A polishing system comprising an object to be polished containing a material having a silicon-silicon bond, a polishing pad having a shore D hardness of 30 or more, and a polishing composition,
- wherein the polishing composition comprises
- (A) an amine compound having a heterocyclic structure containing two or more nitrogen atoms, and
- (B) a water-soluble polymer,
- a content mass ratio of the component (A) to the component (B) (component (A)/component (B)) is 1 or more, the polishing composition has a pH of 8 or more, and the polishing composition is substantially free of an abrasive grain, and
- wherein a surface of the object to be polished is contacted with the polishing pad and the polishing composition.
Dependencies are inferred from the claim text.